OPTICAL MICROLITHOGRAPHY XXIV

OPTICAL MICROLITHOGRAPHY XXIV

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044229
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  • Title: Optical Microlithography XXIV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 1-3 March 2011, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7973
  • Editor: Dusa, Mircea V.
  • ISBN: 9780819485328
  • Pages: 1,020 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2011 )

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  • Title: Optical Microlithography XXIV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 1-3 March 2011, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7973
  • Editor: Dusa, Mircea V.
  • ISBN: 9780819485328
  • Pages: 1,020 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2011 )