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OPTICAL MICROLITHOGRAPHY XXI (3 PARTS)
- Item #:
- 043182
- UPC:
Details
-
Title:
Optical Microlithography XXI
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-29 February 2008, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 6924
-
Editor:
Levinson, Harry J.
-
ISBN:
9780819471093
-
Pages:
1,738 (3 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2008 )
-
Title:
Optical Microlithography XXI
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-29 February 2008, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 6924
-
Editor:
Levinson, Harry J.
-
ISBN:
9780819471093
-
Pages:
1,738 (3 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2008 )