OPTICAL MICROLITHOGRAPHY XX (3 PARTS)

OPTICAL MICROLITHOGRAPHY XX (3 PARTS)

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042807
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Details

  • Title: Optical Microlithography XX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 2 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6520
  • Editor: Flagello, Donis G
  • ISBN: 9780819466396
  • Pages: 1,768 (3 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )

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Tab 4

 
  • Title: Optical Microlithography XX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 2 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6520
  • Editor: Flagello, Donis G
  • ISBN: 9780819466396
  • Pages: 1,768 (3 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )