Details
- Title: ULSI Process Integration 6
- Subtitle: 216th ECS Meeting
- Date/Location: Held 4-9 October 2009, Vienna, Austria.
- Series: ECS Transactions Volume 25 No.07
- Editor: Claeys, C. et al.
- ISBN: 9781607680949
- Pages: 533 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2017 )
Description
Members/Attendees
Tab 4
- Title: ULSI Process Integration 6
- Subtitle: 216th ECS Meeting
- Date/Location: Held 4-9 October 2009, Vienna, Austria.
- Series: ECS Transactions Volume 25 No.07
- Editor: Claeys, C. et al.
- ISBN: 9781607680949
- Pages: 533 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2017 )