Details
- Title: ULSI Process Integration 7
- Subtitle: 220th ECS Meeting
- Date/Location: Held 9-14 October 2011, Boston, Massachusetts, USA.
- Series: ECS Transactions Volume 41 No.07
- Editor: Claeys, C. et al.
- ISBN: 9781607682615
- Pages: 417 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( May 2017 )
Description
Members/Attendees
Tab 4
- Title: ULSI Process Integration 7
- Subtitle: 220th ECS Meeting
- Date/Location: Held 9-14 October 2011, Boston, Massachusetts, USA.
- Series: ECS Transactions Volume 41 No.07
- Editor: Claeys, C. et al.
- ISBN: 9781607682615
- Pages: 417 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( May 2017 )