ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XIII

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075536

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Title: Advanced Etch Technology and Process Integration for Nanopatterning XIII
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 25-29 February 2024, San Jose, California, USA.
Series: Proceedings of SPIE Volume 12958
Editor: Mohanty, Nihar
ISBN: 9781510672222
Pages: 204 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Aug 2024 )

Title: Advanced Etch Technology and Process Integration for Nanopatterning XIII
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 25-29 February 2024, San Jose, California, USA.
Series: Proceedings of SPIE Volume 12958
Editor: Mohanty, Nihar
ISBN: 9781510672222
Pages: 204 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Aug 2024 )