ADVANCES IN PATTERNING MATERIALS AND PROCESSES XLI

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XLI

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  • Title: Advances in Patterning Materials and Processes XLI
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12957
  • Editor: Guerrero, Douglas J.
  • ISBN: 9781510672208
  • Pages: 510 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )

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  • Title: Advances in Patterning Materials and Processes XLI
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12957
  • Editor: Guerrero, Douglas J.
  • ISBN: 9781510672208
  • Pages: 510 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )