OPTICAL AND EUV NANOLITHOGRAPHY XXXVII

OPTICAL AND EUV NANOLITHOGRAPHY XXXVII

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  • Title: Optical and EUV Nanolithography XXXVII
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12953
  • Editor: Burkhardt, Martin
  • ISBN: 9781510672123
  • Pages: 488 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )
  • Title: Optical and EUV Nanolithography XXXVII
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12953
  • Editor: Burkhardt, Martin
  • ISBN: 9781510672123
  • Pages: 488 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )