ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS X

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS X

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072018
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  • Title: Advances in Metrology for X-Ray and EUV Optics X
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 20-24 August 2023, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 12695
  • Editor: Assoufid, Lahsen
  • ISBN: 9781510666047
  • Pages: 144 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jan 2024 )

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  • Title: Advances in Metrology for X-Ray and EUV Optics X
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 20-24 August 2023, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 12695
  • Editor: Assoufid, Lahsen
  • ISBN: 9781510666047
  • Pages: 144 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jan 2024 )