OPTICS DAMAGE AND MATERIALS PROCESSING BY EUV/X-RAY RADIATION (XDAM8)

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069933

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Details

Title: Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8)
Subtitle: At SPIE Optics + Optoelectronics
Date/Location: Held 24-26 April 2023, Prague, Czech Republic.
Series: Proceedings of SPIE Volume 12578
Editor: Juha, Libor
ISBN: 9781510662766
Pages: 46 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Sep 2023 )

Title: Optics Damage and Materials Processing by EUV/X-ray Radiation (XDam8)
Subtitle: At SPIE Optics + Optoelectronics
Date/Location: Held 24-26 April 2023, Prague, Czech Republic.
Series: Proceedings of SPIE Volume 12578
Editor: Juha, Libor
ISBN: 9781510662766
Pages: 46 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Sep 2023 )