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NOVEL PATTERNING TECHNOLOGIES 2023
- Item #:
- 069897
- UPC:
Details
-
Title:
Novel Patterning Technologies 2023
-
Subtitle:
At SPIE Advanced Lithography + Patterning
-
Date/Location:
Held 27 February - 2 March 2023, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 12497
-
Editor:
Liddle, J. Alexander
-
ISBN:
9781510661011
-
Pages:
272 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Sep 2023 )
-
Title:
Novel Patterning Technologies 2023
-
Subtitle:
At SPIE Advanced Lithography + Patterning
-
Date/Location:
Held 27 February - 2 March 2023, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 12497
-
Editor:
Liddle, J. Alexander
-
ISBN:
9781510661011
-
Pages:
272 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Sep 2023 )