ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XI

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066165

Our Price: $90.00

Details

Title: Advanced Etch Technology and Process Integration for Nanopatterning XI
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
Series: Proceedings of SPIE Volume 12056
Editor: Bannister, Julie
ISBN: 9781510649873
Pages: 126 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2023 )

Title: Advanced Etch Technology and Process Integration for Nanopatterning XI
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
Series: Proceedings of SPIE Volume 12056
Editor: Bannister, Julie
ISBN: 9781510649873
Pages: 126 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2023 )