METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVI

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVI

Item #:
066162
Our Price: $140.00
Adding to cart… The item has been added

Details

  • Title: Metrology, Inspection, and Process Control XXXVI
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
  • Series: Proceedings of SPIE Volume 12053
  • Editor: Robinson, John C.
  • ISBN: 9781510649811
  • Pages: 726 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2023 )

Description

 

Members/Attendees

 

Tab 4

 
  • Title: Metrology, Inspection, and Process Control XXXVI
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
  • Series: Proceedings of SPIE Volume 12053
  • Editor: Robinson, John C.
  • ISBN: 9781510649811
  • Pages: 726 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2023 )