DTCO AND COMPUTATIONAL PATTERNING

Item #:

066161

Our Price: $110.00

Details

Title: DTCO and Computational Patterning
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
Series: Proceedings of SPIE Volume 12052
Editor: Kim, Ryoung-Han
ISBN: 9781510649798
Pages: 340 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2023 )

Title: DTCO and Computational Patterning
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 24-28 April 2022, San Jose, California, USA; and 23-27 May 2022 Online.
Series: Proceedings of SPIE Volume 12052
Editor: Kim, Ryoung-Han
ISBN: 9781510649798
Pages: 340 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2023 )