MODELING ASPECTS IN OPTICAL METROLOGY VI

MODELING ASPECTS IN OPTICAL METROLOGY VI

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  • Title: Modeling Aspects in Optical Metrology VI
  • Subtitle: At SPIE Optical Metrology
  • Date/Location: Held 26-28 June 2017, Munich, Germany.
  • Series: Proceedings of SPIE Volume 10330
  • Editor: Bodermann, Bernd
  • ISBN: 9781510611054
  • Pages: 460 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2017 )

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  • Title: Modeling Aspects in Optical Metrology VI
  • Subtitle: At SPIE Optical Metrology
  • Date/Location: Held 26-28 June 2017, Munich, Germany.
  • Series: Proceedings of SPIE Volume 10330
  • Editor: Bodermann, Bernd
  • ISBN: 9781510611054
  • Pages: 460 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2017 )