ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIV

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIV

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046396
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  • Title: Advances in Patterning Materials and Processes XXXIV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 3 March 2017, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10146
  • Editor: Hohle, Christoph K.
  • ISBN: 9781510607439
  • Pages: 508 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2017 )

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  • Title: Advances in Patterning Materials and Processes XXXIV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 3 March 2017, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10146
  • Editor: Hohle, Christoph K.
  • ISBN: 9781510607439
  • Pages: 508 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2017 )