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PHOTOMASK JAPAN 2016: XXIII SYMPOSIUM ON PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY
- Item #:
- 046236
- UPC:
Details
-
Title:
Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
-
Date/Location:
Held 6-8 April 2016, Yokohama, Japan.
-
Series:
Proceedings of SPIE Volume 9984
-
Editor:
Yoshioka, Nobuyuki
-
ISBN:
9781510603721
-
Pages:
240 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Sep 2016 )
-
Title:
Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
-
Date/Location:
Held 6-8 April 2016, Yokohama, Japan.
-
Series:
Proceedings of SPIE Volume 9984
-
Editor:
Yoshioka, Nobuyuki
-
ISBN:
9781510603721
-
Pages:
240 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Sep 2016 )