ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VI

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VI

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046214
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  • Title: Advances in Metrology for X-Ray and EUV Optics VI
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 29 August 2016, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 9962
  • Editor: Assoufid, Lahsen
  • ISBN: 9781510603158
  • Pages: 100 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Dec 2016 )

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  • Title: Advances in Metrology for X-Ray and EUV Optics VI
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 29 August 2016, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 9962
  • Editor: Assoufid, Lahsen
  • ISBN: 9781510603158
  • Pages: 100 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Dec 2016 )