OPTICAL MICROLITHOGRAPHY XXIX

OPTICAL MICROLITHOGRAPHY XXIX

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046032
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Details

  • Title: Optical Microlithography XXIX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2016, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9780
  • Editor: Erdmann, Andreas
  • ISBN: 9781510600157
  • Pages: 532 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2016 )

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  • Title: Optical Microlithography XXIX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2016, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9780
  • Editor: Erdmann, Andreas
  • ISBN: 9781510600157
  • Pages: 532 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2016 )