EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VII

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VII

Item #:
046028
Our Price: $165.00
Adding to cart… The item has been added

Details

  • Title: Extreme Ultraviolet (EUV) Lithography VII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 22-25 February 2016, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9776
  • Editor: Panning, Eric M.
  • ISBN: 9781510600119
  • Pages: 758 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2016 )

Description

 

Members/Attendees

 

Tab 4

 
  • Title: Extreme Ultraviolet (EUV) Lithography VII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 22-25 February 2016, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9776
  • Editor: Panning, Eric M.
  • ISBN: 9781510600119
  • Pages: 758 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2016 )