OPTICAL MICROLITHOGRAPHY XXVIII

OPTICAL MICROLITHOGRAPHY XXVIII

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045682
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Details

  • Title: Optical Microlithography XXVIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-26 February 2015, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9426
  • Editor: Lai, Kafai
  • ISBN: 9781628415285
  • Pages: 668 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2015 )

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  • Title: Optical Microlithography XXVIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-26 February 2015, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9426
  • Editor: Lai, Kafai
  • ISBN: 9781628415285
  • Pages: 668 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2015 )