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ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXII
- Item #:
- 045681
- UPC:
Details
-
Title:
Advances in Patterning Materials and Processes XXXII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 23-26 February 2015, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9425
-
Editor:
Wallow, Thomas I.
-
ISBN:
9781628415278
-
Pages:
556 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2015 )
-
Title:
Advances in Patterning Materials and Processes XXXII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 23-26 February 2015, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9425
-
Editor:
Wallow, Thomas I.
-
ISBN:
9781628415278
-
Pages:
556 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2015 )