OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS III

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045532
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  • Title: Optical Metrology and Inspection for Industrial Applications III
  • Subtitle: At SPIE/COS Photonics Asia
  • Date/Location: Held 9-11 October 2014, Beijing, China.
  • Series: Proceedings of SPIE Volume 9276
  • Editor: Han, Sen
  • ISBN: 9781628413496
  • Pages: 490 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Dec 2014 )

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  • Title: Optical Metrology and Inspection for Industrial Applications III
  • Subtitle: At SPIE/COS Photonics Asia
  • Date/Location: Held 9-11 October 2014, Beijing, China.
  • Series: Proceedings of SPIE Volume 9276
  • Editor: Han, Sen
  • ISBN: 9781628413496
  • Pages: 490 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Dec 2014 )