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30TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
- Item #:
- 045487
- UPC:
Details
-
Title:
30th European Mask and Lithography Conference
-
Date/Location:
Held 24-25 June 2014, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 9231
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9781628412857
-
Pages:
272 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Oct 2014 )
-
Title:
30th European Mask and Lithography Conference
-
Date/Location:
Held 24-25 June 2014, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 9231
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9781628412857
-
Pages:
272 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Oct 2014 )