ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS V

ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS V

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045462
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Details

  • Title: Advances in Metrology for X-Ray and EUV Optics V
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 18 August 2014, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 9206
  • Editor: Assoufid, Lahsen
  • ISBN: 9781628412338
  • Pages: 158 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Oct 2014 )

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  • Title: Advances in Metrology for X-Ray and EUV Optics V
  • Subtitle: At SPIE Optical Engineering + Applications
  • Date/Location: Held 18 August 2014, San Diego, California, USA.
  • Series: Proceedings of SPIE Volume 9206
  • Editor: Assoufid, Lahsen
  • ISBN: 9781628412338
  • Pages: 158 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Oct 2014 )