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DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII
- Item #:
- 045309
- UPC:
Details
-
Title:
Design-Process-Technology Co-optimization for Manufacturability VIII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9053
-
Editor:
Sturtevant, John L.
-
ISBN:
9780819499769
-
Pages:
328 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )
-
Title:
Design-Process-Technology Co-optimization for Manufacturability VIII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9053
-
Editor:
Sturtevant, John L.
-
ISBN:
9780819499769
-
Pages:
328 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )