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OPTICAL MICROLITHOGRAPHY XXVII
- Item #:
- 045308
- UPC:
Details
-
Title:
Optical Microlithography XXVII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 25-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9052
-
Editor:
Lai, Kafai
-
ISBN:
9780819499752
-
Pages:
762 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )
-
Title:
Optical Microlithography XXVII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 25-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9052
-
Editor:
Lai, Kafai
-
ISBN:
9780819499752
-
Pages:
762 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )