ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXI

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXI

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045307
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  • Title: Advances in Patterning Materials and Processes XXXI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-27 February 2014, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9051
  • Editor: Wallow, Thomas I.
  • ISBN: 9780819499745
  • Pages: 620 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2014 )

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  • Title: Advances in Patterning Materials and Processes XXXI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-27 February 2014, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 9051
  • Editor: Wallow, Thomas I.
  • ISBN: 9780819499745
  • Pages: 620 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2014 )