METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVIII

Item #:

045306

Our Price: $170.00

Details

Title: Metrology, Inspection, and Process Control for Microlithography XXVIII
Subtitle: At SPIE Advanced Lithography
Date/Location: Held 24-27 February 2014, San Jose, California, USA.
Series: Proceedings of SPIE Volume 9050
Editor: Cain, Jason P.
ISBN: 9780819499738
Pages: 962 (2 Vols) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( May 2014 )

Title: Metrology, Inspection, and Process Control for Microlithography XXVIII
Subtitle: At SPIE Advanced Lithography
Date/Location: Held 24-27 February 2014, San Jose, California, USA.
Series: Proceedings of SPIE Volume 9050
Editor: Cain, Jason P.
ISBN: 9780819499738
Pages: 962 (2 Vols) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( May 2014 )