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EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY V
- Item #:
- 045304
- UPC:
Details
-
Title:
Extreme Ultraviolet (EUV) Lithography V
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 24-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9048
-
Editor:
Wood II, Obert R.
-
ISBN:
9780819499714
-
Pages:
922 (2 Vols) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )
-
Title:
Extreme Ultraviolet (EUV) Lithography V
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 24-27 February 2014, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 9048
-
Editor:
Wood II, Obert R.
-
ISBN:
9780819499714
-
Pages:
922 (2 Vols) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2014 )