RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MOEMS/MEMS, NANODEVICES, AND NANOMATERIALS XIII

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045231

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Title: Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
Subtitle: At SPIE MOEMS-MEMS
Date/Location: Held 3-4 February 2014, San Francisco, California, USA.
Series: Proceedings of SPIE Volume 8975
Editor: Shea, Herbert R.
ISBN: 9780819498885
Pages: 216 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Mar 2014 )

Title: Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
Subtitle: At SPIE MOEMS-MEMS
Date/Location: Held 3-4 February 2014, San Francisco, California, USA.
Series: Proceedings of SPIE Volume 8975
Editor: Shea, Herbert R.
ISBN: 9780819498885
Pages: 216 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Mar 2014 )