MODELING ASPECTS IN OPTICAL METROLOGY IV

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045045
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  • Title: Modeling Aspects in Optical Metrology IV
  • Subtitle: At SPIE Optical Metrology 2013
  • Date/Location: Held 13-15 May 2013, Munich, Germany.
  • Series: Proceedings of SPIE Volume 8789
  • Editor: Bodermann, Bernd
  • ISBN: 9780819496058
  • Pages: 384 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2013 )

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  • Title: Modeling Aspects in Optical Metrology IV
  • Subtitle: At SPIE Optical Metrology 2013
  • Date/Location: Held 13-15 May 2013, Munich, Germany.
  • Series: Proceedings of SPIE Volume 8789
  • Editor: Bodermann, Bernd
  • ISBN: 9780819496058
  • Pages: 384 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2013 )