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OPTICAL MICROLITHOGRAPHY XXVI
- Item #:
- 044939
- UPC:
Details
-
Title:
Optical Microlithography XXVI
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-28 February 2013, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 8683
-
Editor:
Conley, Will
-
ISBN:
9780819494658
-
Pages:
766 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )
-
Title:
Optical Microlithography XXVI
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-28 February 2013, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 8683
-
Editor:
Conley, Will
-
ISBN:
9780819494658
-
Pages:
766 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )