ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXX

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Details

  • Title: Advances in Resist Materials and Processing Technology XXX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-27 February 2013, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8682
  • Editor: Somervell, Mark H.
  • ISBN: 9780819494641
  • Pages: 610 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2013 )

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  • Title: Advances in Resist Materials and Processing Technology XXX
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-27 February 2013, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8682
  • Editor: Somervell, Mark H.
  • ISBN: 9780819494641
  • Pages: 610 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2013 )