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METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVII
- Item #:
- 044937
- UPC:
Details
-
Title:
Metrology, Inspection, and Process Control for Microlithography XXVII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 25-28 February 2013, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 8681
-
Editor:
Starikov, Alexander
-
ISBN:
9780819494634
-
Pages:
984 (2 Vols) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )
-
Title:
Metrology, Inspection, and Process Control for Microlithography XXVII
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 25-28 February 2013, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 8681
-
Editor:
Starikov, Alexander
-
ISBN:
9780819494634
-
Pages:
984 (2 Vols) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )