Skip to main content
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XVIII
- Item #:
- 044868
- UPC:
Details
-
Title:
Micromachining and Microfabrication Process Technology XVIII
-
Subtitle:
At SPIE MOEMS-MEMS
-
Date/Location:
Held 5-8 February 2013, San Francisco, California, USA.
-
Series:
Proceedings of SPIE Volume 8612
-
Editor:
Maher, Mary Ann
-
ISBN:
9780819493811
-
Pages:
190 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2013 )
-
Title:
Micromachining and Microfabrication Process Technology XVIII
-
Subtitle:
At SPIE MOEMS-MEMS
-
Date/Location:
Held 5-8 February 2013, San Francisco, California, USA.
-
Series:
Proceedings of SPIE Volume 8612
-
Editor:
Maher, Mary Ann
-
ISBN:
9780819493811
-
Pages:
190 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2013 )