INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VI

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044722

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Title: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Subtitle: At SPIE NanoScience + Engineering
Date/Location: Held 13-14 August 2012, San Diego, California, USA.
Series: Proceedings of SPIE Volume 8466
Editor: Postek, Michael T.
ISBN: 9780819491831
Pages: 194 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Oct 2012 )

Title: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
Subtitle: At SPIE NanoScience + Engineering
Date/Location: Held 13-14 August 2012, San Diego, California, USA.
Series: Proceedings of SPIE Volume 8466
Editor: Postek, Michael T.
ISBN: 9780819491831
Pages: 194 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Oct 2012 )