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28TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
- Item #:
- 044608
- UPC:
Details
-
Title:
28th European Mask and Lithography Conference
-
Date/Location:
Held 17-18 January 2012, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 8352
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9780819490308
-
Pages:
366 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( May 2012 )
-
Title:
28th European Mask and Lithography Conference
-
Date/Location:
Held 17-18 January 2012, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 8352
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9780819490308
-
Pages:
366 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( May 2012 )