DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION VI

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044583
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  • Title: Design for Manufacturability through Design-Process Integration VI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 15-16 February 2012, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8327
  • Editor: Mason, Mark E.
  • ISBN: 9780819489838
  • Pages: 360 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2012 )

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  • Title: Design for Manufacturability through Design-Process Integration VI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 15-16 February 2012, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8327
  • Editor: Mason, Mark E.
  • ISBN: 9780819489838
  • Pages: 360 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2012 )