OPTICAL MICROLITHOGRAPHY XXV

OPTICAL MICROLITHOGRAPHY XXV

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044582
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Details

  • Title: Optical Microlithography XXV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 13-16 February 2012, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8326
  • Editor: Conley, Will
  • ISBN: 9780819489821
  • Pages: 946 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2012 )

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  • Title: Optical Microlithography XXV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 13-16 February 2012, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 8326
  • Editor: Conley, Will
  • ISBN: 9780819489821
  • Pages: 946 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2012 )