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27TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE
- Item #:
- 044241
- UPC:
Details
-
Title:
27th European Mask and Lithography Conference
-
Date/Location:
Held 18-19 January 2011, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 7985
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9780819485533
-
Pages:
354 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2011 )
-
Title:
27th European Mask and Lithography Conference
-
Date/Location:
Held 18-19 January 2011, Dresden, Germany.
-
Series:
Proceedings of SPIE Volume 7985
-
Editor:
Behringer, Uwe F.W.
-
ISBN:
9780819485533
-
Pages:
354 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2011 )