ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXVIII

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  • Title: Advances in Resist Materials and Processing Technology XXVIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 2 March 2011, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7972
  • Editor: Allen, Robert D.
  • ISBN: 9780819485311
  • Pages: 870 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2011 )

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  • Title: Advances in Resist Materials and Processing Technology XXVIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 2 March 2011, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7972
  • Editor: Allen, Robert D.
  • ISBN: 9780819485311
  • Pages: 870 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2011 )