Skip to main content
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES III
- Item #:
- 044226
- UPC:
Details
-
Title:
Alternative Lithographic Technologies III
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 1-3 March 2011, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7970
-
Editor:
Herr, Daniel J. C.
-
ISBN:
9780819485298
-
Pages:
426 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2011 )
-
Title:
Alternative Lithographic Technologies III
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 1-3 March 2011, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7970
-
Editor:
Herr, Daniel J. C.
-
ISBN:
9780819485298
-
Pages:
426 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Apr 2011 )