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ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS III
- Item #:
- 044057
- UPC:
Details
-
Title:
Advances in Metrology for X-Ray and EUV Optics III
-
Subtitle:
At SPIE Optical Engineering + Applications
-
Date/Location:
Held 1 August 2010, San Diego, California, USA.
-
Series:
Proceedings of SPIE Volume 7801
-
Editor:
Assoufid, Lahsen
-
ISBN:
9780819482976
-
Pages:
150 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Aug 2010 )
-
Title:
Advances in Metrology for X-Ray and EUV Optics III
-
Subtitle:
At SPIE Optical Engineering + Applications
-
Date/Location:
Held 1 August 2010, San Diego, California, USA.
-
Series:
Proceedings of SPIE Volume 7801
-
Editor:
Assoufid, Lahsen
-
ISBN:
9780819482976
-
Pages:
150 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Aug 2010 )