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DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION IV
- Item #:
- 043897
- UPC:
Details
-
Title:
Design for Manufacturability through Design-Process Integration IV
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 24-25 February 2010, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7641
-
Editor:
Rieger, Michael L.
-
ISBN:
9780819480552
-
Pages:
358 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2010 )
-
Title:
Design for Manufacturability through Design-Process Integration IV
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 24-25 February 2010, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7641
-
Editor:
Rieger, Michael L.
-
ISBN:
9780819480552
-
Pages:
358 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2010 )