OPTICAL MICROLITHOGRAPHY XXIII

OPTICAL MICROLITHOGRAPHY XXIII

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043896
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  • Title: Optical Microlithography XXIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2010, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7640
  • Editor: Dusa, Mircea V.
  • ISBN: 9780819480545
  • Pages: 1,218 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2010 )

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  • Title: Optical Microlithography XXIII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2010, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7640
  • Editor: Dusa, Mircea V.
  • ISBN: 9780819480545
  • Pages: 1,218 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2010 )