ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES II

ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES II

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043893
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Details

  • Title: Alternative Lithographic Technologies II
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2010, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7637
  • Editor: Herr, Daniel J. C.
  • ISBN: 9780819480514
  • Pages: 486 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2010 )

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  • Title: Alternative Lithographic Technologies II
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 23-25 February 2010, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7637
  • Editor: Herr, Daniel J. C.
  • ISBN: 9780819480514
  • Pages: 486 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2010 )