MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XV

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XV

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  • Title: Micromachining and Microfabrication Process Technology XV
  • Subtitle: At SPIE MOEMS-MEMS
  • Date/Location: Held 26 January 2010, San Francisco, California, USA.
  • Series: Proceedings of SPIE Volume 7590
  • Editor: Maher, Mary Ann
  • ISBN: 9780819479860
  • Pages: 222 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2010 )

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  • Title: Micromachining and Microfabrication Process Technology XV
  • Subtitle: At SPIE MOEMS-MEMS
  • Date/Location: Held 26 January 2010, San Francisco, California, USA.
  • Series: Proceedings of SPIE Volume 7590
  • Editor: Maher, Mary Ann
  • ISBN: 9780819479860
  • Pages: 222 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2010 )