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DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION III
- Item #:
- 043531
- UPC:
Details
-
Title:
Design for Manufacturability through Design-Process Integration III
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-27 February 2009, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7275
-
Editor:
Singh, Vivek K.
-
ISBN:
9780819475282
-
Pages:
528 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2009 )
-
Title:
Design for Manufacturability through Design-Process Integration III
-
Subtitle:
At SPIE Advanced Lithography
-
Date/Location:
Held 26-27 February 2009, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 7275
-
Editor:
Singh, Vivek K.
-
ISBN:
9780819475282
-
Pages:
528 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Mar 2009 )