OPTICAL MICROLITHOGRAPHY XXII

OPTICAL MICROLITHOGRAPHY XXII

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043530
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Details

  • Title: Optical Microlithography XXII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-27 February 2009, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7274
  • Editor: Levinson, Harry J.
  • ISBN: 9780819475275
  • Pages: 1,206 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2009 )

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  • Title: Optical Microlithography XXII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 24-27 February 2009, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7274
  • Editor: Levinson, Harry J.
  • ISBN: 9780819475275
  • Pages: 1,206 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2009 )